MEMS Flow Sensor Working Principle: A Comprehensive Guide

mems flow sensor working principle

MEMS flow sensors operate on thermal principles, utilizing a heating element and temperature sensors to measure fluid flow. These miniature devices leverage the calorimetric thermal mass flow measurement principle, where the temperature difference between upstream and downstream sensors correlates to the mass flow rate. MEMS flow sensors offer high accuracy, typically within ±2% to ±2.5% … Read more